REFERENCE PROJECT 02

Vertical High-Vacuum Chamber

An integrated chamber, pumping package and instrumentation platform for plasma, coating, testing and R&D processes that require a controlled low-pressure environment.

Engineered for the target pressureVacuum instrumentation integrationPump and vacuum-line integration
TECHNICAL SPECIFICATIONS

Vertical high-vacuum chamber

Chamber dimensions320 × 300 mm
Chamber typeVertical cylindrical vacuum chamber
Chamber materialAISI 304 stainless-steel body transparent acrylic lid
Vacuum level≈ 1.33 × 10−3 mbar
Chamber sealL-profile gasket
Vacuum portNW40
Vent port1.0″ NPT
Vacuum-gauge port1/4″ NPT
Leak rate≈ 1.01 × 10−8 mbar·L/s (helium)
FUNCTION

Creates a controlled and repeatable vacuum environment

High-vacuum chambers are used where the atmospheric gas load must be reduced and the process must run under clean, controlled conditions. Chamber volume, target pressure, process gas, material load and cycle time are evaluated together to define the main system architecture.

In ZEROVAC projects, the chamber, pump technology, vacuum instruments, valves, connection ports, sight glass, line components and support frame are engineered as one system. The final configuration and achievable vacuum level are determined from the actual operating conditions.

APPLICATIONS

Precision manufacturing and research

  • Plasma processing, surface activation and cleaning
  • Thin-film and specialised coating applications
  • R&D laboratories and material testing
  • Electronic, sensor and optical-component development
  • Vacuum degassing, drying and conditioning
  • Analytical instruments and custom test rigs